Negative ion formation in the scattering of CF+3 from graphite
Appl. Phys. Lett. , Volume 77 p. 1096- 1098
The scattering of CF+3 from highly oriented pyrolytic graphite results in the formation of CF-3. Comparison is made with CF+3 scattering from a metal and from an insulator surface, which do not yield negative molecular ions. The outcome of the charge transfer processes that occur as CF+3 approaches a surface is critically dependent on the electronic properties of that surface. The ability to produce a stable negative ion close to a surface may be an important factor in the etching efficiency of the CF+3 molecule.
|Appl. Phys. Lett.|
Gleeson, M. A, Kropholler, M, & Kleyn, A.W. (2000). Negative ion formation in the scattering of CF+3 from graphite. Appl. Phys. Lett., 77, 1096–1098.