Fabrication of a novel scanning probe device for quantitative nanotribology
Sens. Actuators A , Volume 84 p. 18- 24
In this work a new scanning probe device for quantitative frictional force measurements is presented. The design of this so-called "tribolever" is optimized for lateral or frictional force detection, with relatively less sensitivity for vertical and torsional motions. Fabrication process for the complicated 3-D structure in a silicon wafer has been developed using a combination of anisotropic deep dry etchings and crystallographic wet etching. Additional fabrication techniques have been explored to tune the mechanical properties of a given tribolever device to the right operation regime.
|Sens. Actuators A|
Zijlstra, T, Heimberg, J. A, van der Drift, E, Glastra van Loon, D, Dienwiebel, M, de Groot, L. E. M, & Frenken, J. W. M. (2000). Fabrication of a novel scanning probe device for quantitative nanotribology. Sens. Actuators A, 84, 18–24.