Pre-amorphization damage in ion-implanted silicon = Restschade in ionen-ge

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Promotor	F.W. Saris
Degree Grantor	Utrecht University
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Schreutelkamp, R. (1991, September 4). Pre-amorphization damage in ion-implanted silicon = Restschade in ionen-ge.

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