Additional Metadata
Publisher Pergamon
Editor H. Adam
Citation
Rol, P. K, Onderdelinden, D, & Kistemaker, J. (1966). Some physical aspects of sputtering. In H Adam (Ed.), 1965 Transactions of the Third International Vacuum Congress, 28 June-2 July 1965, Stuttgart, Germany, Vol. 1 : Invited Papers (pp. 75–82). Pergamon.