Some physical aspects of sputtering

Additional Metadata
Publisher	Pergamon
Editor	H. Adam
Citation APA-ALL APA Style APA-ALL Style AAA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Rol, P. K., Onderdelinden, D.& Kistemaker, J. (1966). Some physical aspects of sputtering. In H. Adam (Ed.), 1965 Transactions of the Third International Vacuum Congress, 28 June-2 July 1965, Stuttgart, Germany, Vol. 1 : Invited Papers (pp. 75–82).

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