Additional Metadata
Publisher Editions Ophrys
Editor P. Glotin
Citation
Sigmund, P, & Sanders, J. -B. (1967). Spatial distribution of energy deposited by ion bombardment. In P Glotin (Ed.), Colloque International sur les Applications des Faisceaux Ioniques a la Technologie des Semiconducteurs = International Conference on Applications of Ions [sic] Beams to Semiconductor Technology, Grenoble, 24-26 Mai, 1967 (pp. 1–23). Editions Ophrys.