Spatial distribution of energy deposited by ion bombardment

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Publisher	Editions Ophrys
Editor	P. Glotin
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Sigmund, P., & Sanders, J.-B. (1967). Spatial distribution of energy deposited by ion bombardment. In P. Glotin (Ed.), Colloque International sur les Applications des Faisceaux Ioniques a la Technologie des Semiconducteurs = International Conference on Applications of Ions [sic] Beams to Semiconductor Technology, Grenoble, 24-26 Mai, 1967 (pp. 1–23).

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