Analysis of Si thin films prepared by ion beam sputtering

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Publisher	F. Berger & Sohne
Editor	R. Dozobrozemsky
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Bhattacharya, R. S., Kerkdijk, C. B. W., Hoonhout, D., & Saris, F. W. (1977). Analysis of Si thin films prepared by ion beam sputtering. In R. Dozobrozemsky (Ed.), Proceedings of the 7th International Vacuum Congress and the 3rd International Conference on Solid Surfaces and the 3rd International Conference on Solid Surfaces of the International Union for Vacuum Science, Technique and Applications, Sept. 12 - 16, 19 (pp. 1345–1347).

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