Additional Metadata
Publisher Istituto di Struttura della Materia Universit
Editor E. Rimini
Citation
Hoonhout, D, Tamminga, Y, Garrett, W. R, & Saris, F.W. (1978). The influence of the dopant and annealing of ion-implanted silicon with a ruby laser. In E Rimini (Ed.), Proceedings of "Laser Effects in Ion Implanted Semiconductors", Catania, August 31 - September 2, 1978 (pp. 168–179). Istituto di Struttura della Materia Universit.