Additional Metadata
Publisher Institut für Allgemeine Physik
Editor P. Varga , G. Betz , F. P. Viehb
Citation
de Vries, A. E. (1980). Energy distributions of sputtered neutral particles by ion bombardment. In P Varga, G Betz, & F. P Viehb (Eds.), Symposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 (pp. 256–279). Institut für Allgemeine Physik.