Additional Metadata
Publisher Institut für Allgemeine Physik
Editor P. Varga , G. Betz , F. P. Viehb
Citation
Roosendaal, H. E, & Sanders, J. -B. (1980). Anisotropy effects in the energy and angular distribution of sputtered particles. In P Varga, G Betz, & F. P Viehb (Eds.), Symposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 (pp. 302–311). Institut für Allgemeine Physik.