Anisotropy effects in the energy and angular distribution of sputtered particles

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Publisher	Institut fÃ¼r Allgemeine Physik
Editor	P. Varga , G. Betz , F. P. Viehb
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Roosendaal, H. E, & Sanders, J. -B. (1980). Anisotropy effects in the energy and angular distribution of sputtered particles. In P Varga, G Betz, & F. P Viehb (Eds.), Symposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 (pp. 302–311). Institut fÃ¼r Allgemeine Physik.

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