Additional Metadata
Publisher Institut für Allgemeine Physik
Editor P. Varga , G. Betz , F. P. Viehb
Citation
Szymonski, M, Paschke, U, Pedrys, R, Haring, R. A, Haring, R. A, Roosendaal, H. E, … de Vries, A. E. (1980). The energy distribution of molecules sputtered from frozen SF6. In P Varga, G Betz, & F. P Viehb (Eds.), Molecular ScatteringSymposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 (pp. 312–319). Institut für Allgemeine Physik.