Additional Metadata
Journal Jpn. J. Appl. Phys.
Citation
Yamada, I, Saris, F.W, Takagi, T, Matsubara, K, Takaoka, H, & Ishiyama, S. (1980). Crystalline and electrical characteristics of silicon films deposited by ionized-cluster-beams. Jpn. J. Appl. Phys., 19, 181–184.