Additional Metadata
Publisher North-Holland
Editor B. R. Appleton , G. K. Celler
Citation
Westendorp, J. F. M, Wang, Z. L, & Saris, F.W. (1982). An ion-scattering study of oxygen indiffusion during pulsed laser annealing/cleaning of silicon. In B. R Appleton & G. K Celler (Eds.), Laser and Electron-Beam Interactions with Solids : Proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A. (pp. 255–260). North-Holland.