Reactive sputtering of simple condensed gases by keV heavy ion bombardment

1983

Nucl. Instrum. Methods , Volume 211 p. 529- 533

Additional Metadata
Journal	Nucl. Instrum. Methods
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Haring, R. A., Haring, R. A., Klein, F. S., Kummel, A. C., & de Vries, A. E. (1983). Reactive sputtering of simple condensed gases by keV heavy ion bombardment. Nucl. Instrum. Methods, 211, 529–533.

Publication