Additional Metadata
Journal J. Vac. Sci. Technol. A
Citation
Sanders, F. H. M, Kolfschoten, A. W, Dieleman, J, Haring, R. A, Haring, R. A, & de Vries, A. E. (1984). Ion-assisted etching of silicon by molecular chorine. J. Vac. Sci. Technol. A, 2, 487–491.