Reactive sputtering of simple condensed gases by keV ions II: mass spectra

1984-01-01

Nucl. Instrum. Methods Phys. Res. B , Volume 5 p. 476- 482

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Journal	Nucl. Instrum. Methods Phys. Res. B
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Haring, R. A, Pedrys, R, Oostra, D. J, Haring, R. A, & de Vries, A. E. (1984). Reactive sputtering of simple condensed gases by keV ions II: mass spectra. Nucl. Instrum. Methods Phys. Res. B, 5, 476–482.

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