1984
Reactive sputtering of simple condensed gases by keV ions II: mass spectra
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 5 p. 476- 482
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Nucl. Instrum. Methods Phys. Res. B | |
Haring, R. A, Pedrys, R, Oostra, D. J, Haring, R. A, & de Vries, A. E. (1984). Reactive sputtering of simple condensed gases by keV ions II: mass spectra. Nucl. Instrum. Methods Phys. Res. B, 5, 476–482.
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