Additional Metadata
Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Haring, R. A, Pedrys, R, Oostra, D. J, Haring, R. A, & de Vries, A. E. (1984). Reactive sputtering of simple condensed gases by keV ions III: kinetic energy distributions. Nucl. Instrum. Methods Phys. Res. B, 5, 483–488.