Reactive sputtering of simple condensed gases by keV ions III: kinetic energy distributions

1984

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Journal	Nucl. Instrum. Methods Phys. Res. B
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Haring, R. A., Pedrys, R., Oostra, D. J., Haring, R. A., & de Vries, A. E. (1984). Reactive sputtering of simple condensed gases by keV ions III: kinetic energy distributions. Nucl. Instrum. Methods Phys. Res., Sect B, 5, 483–488.

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