Additional Metadata
Journal Appl. Phys. Lett.
Citation
Saris, F.W, Hung, L. S, Nastasi, M, Mayer, J. W, & Whitehead, B. (1985). Failure temperature of amorphous Cu-Ta alloys as diffusion barriers in Al-Si contacts. Appl. Phys. Lett., 46, 646–648.