1985-01-01
Ion-assisted etching of silicon by SF6
Publication
Publication
Appl. Phys. Lett.
,
Volume 46
p. 1166-
1168
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Journal | Appl. Phys. Lett. |
Citation |
Oostra, D. J, Haring, R. A, de Vries, A. E, Sanders, F. H. M, & Miyake, K. (1985). Ion-assisted etching of silicon by SF6. Appl. Phys. Lett., 46, 1166–1168.
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