Additional Metadata
Publisher Materials Research Society
Editor J. M. Gibon , L. R. Dawson
Citation
Herbots, N, Gloesener, D, van Loenen, E. J, & Fischer, A. E. M. J. (1985). Surface characterization of arsenic implanted silicon (100): a new insight into the inhibition of aluminium/silicon interdiffusion. In J. M Gibon & L. R Dawson (Eds.), Layered Structures, Epitaxy, and Interfaces : Symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A. (pp. 613–617). Materials Research Society.