Additional Metadata
Publisher Materials Research Society
Editor J.M. Gibson , L.R. Dawson
Citation
Sinke, W.C, Stout, P.K, & Saris, F.W. (1985). Pre-annealing of TiN barriers in A1 metallization of silicon. In J.M Gibson & L.R Dawson (Eds.), Layered Structures, Epitaxy, and Interfaces : Symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A. (pp. 623–628). Materials Research Society.