Additional Metadata
Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Oostra, D. J, Haring, R. A, de Vries, A. E, Sanders, F. H. M, & van Veen, G. N. A. (1986). Etching of silicon by SF6 induced by ion bombardment. Nucl. Instrum. Methods Phys. Res. B, 13, 556–560.