1986
Etching of silicon by SF6 induced by ion bombardment
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 13 p. 556- 560
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Nucl. Instrum. Methods Phys. Res. B | |
Oostra, D. J, Haring, R. A, de Vries, A. E, Sanders, F. H. M, & van Veen, G. N. A. (1986). Etching of silicon by SF6 induced by ion bombardment. Nucl. Instrum. Methods Phys. Res. B, 13, 556–560.
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