1986
Material reaction and silicide formation at the refractory metal/silicon interface
Publication
Publication
Appl. Phys. Lett. , Volume 48 p. 1600- 1602
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Appl. Phys. Lett. | |
Rubloff, G. W, Tromp, R. M, & van Loenen, E. J. (1986). Material reaction and silicide formation at the refractory metal/silicon interface. Appl. Phys. Lett., 48, 1600–1602.
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