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D.J. Oostra, R.A. Haring and A.E. de Vries

1986

Electron-induced etching of silicon by SF6

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Nucl. Instrum. Methods Phys. Res. B , Volume 16 p. 364- 368

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Journal Nucl. Instrum. Methods Phys. Res. B
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Oostra, D.J, Haring, R.A, & de Vries, A.E. (1986). Electron-induced etching of silicon by SF6. Nucl. Instrum. Methods Phys. Res., Sect B, 16, 364–368.

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