1986
Electron-induced etching of silicon by SF6
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 16 p. 364- 368
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Nucl. Instrum. Methods Phys. Res. B | |
Oostra, D.J, Haring, R.A, & de Vries, A.E. (1986). Electron-induced etching of silicon by SF6. Nucl. Instrum. Methods Phys. Res., Sect B, 16, 364–368.
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