Kyoto University
T. Takagi

Ishikawa, J., Douma, S., Urbanus, W. H., Doorn, S., Bannenberg, J. G., & Saris, F. W. (1986). Progress report on the microwave ion source as injector for an MeV implanter. In T. Takagi (Ed.), Proceedings of the Tenth Symposium on Ion Sources and Ion-Assisted Technology; ISIAT'86; June 2nd-4th, 1986 (pp. 105–110).