1986
Progress report on the microwave ion source as injector for an MeV implanter
Publication
Publication
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Kyoto University | |
T. Takagi | |
Ishikawa, J, Douma, S, Urbanus, W. H, Doorn, S, Bannenberg, J. G, & Saris, F.W. (1986). Progress report on the microwave ion source as injector for an MeV implanter. In T Takagi (Ed.), Proceedings of the Tenth Symposium on Ion Sources and Ion-Assisted Technology; ISIAT'86; June 2nd-4th, 1986 (pp. 105–110). Kyoto University.
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