Progress report on the microwave ion source as injector for an MeV implanter

1986-01-01

Additional Metadata
Publisher	Kyoto University
Editor	T. Takagi
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Ishikawa, J, Douma, S, Urbanus, W. H, Doorn, S, Bannenberg, J. G, & Saris, F.W. (1986). Progress report on the microwave ion source as injector for an MeV implanter. In T Takagi (Ed.), Proceedings of the Tenth Symposium on Ion Sources and Ion-Assisted Technology; ISIAT'86; June 2nd-4th, 1986 (pp. 105–110). Kyoto University.

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