1986
Anomalous time-of-flight distributions observed for argon implanted in silicon and resputtered by Ar+-ion bombardment
Publication
Publication
Phys. Rev. Lett. , Volume 57 p. 739- 741
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Phys. Rev. Lett. | |
van Veen, G. N. A, Sanders, F. H. M, Dieleman, J, van Veen, A, Oostra, D. J, & de Vries, A. E. (1986). Anomalous time-of-flight distributions observed for argon implanted in silicon and resputtered by Ar+-ion bombardment. Phys.Rev.Lett., 57, 739–741.
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