1987
A 1 and 2 MV ion implantation facility
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 21 p. 296- 299
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Nucl. Instrum. Methods Phys. Res. B | |
Koudijs, R, Dubbelman, P, Urbanus, W. H, & Bannenberg, J. G. (1987). A 1 and 2 MV ion implantation facility. Nucl. Instrum. Methods Phys. Res. B, 21, 296–299.
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