A 1 and 2 MV ion implantation facility

1987-01-01

Nucl. Instrum. Methods Phys. Res. B , Volume 21 p. 296- 299

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Journal	Nucl. Instrum. Methods Phys. Res. B
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Koudijs, R, Dubbelman, P, Urbanus, W. H, & Bannenberg, J. G. (1987). A 1 and 2 MV ion implantation facility. Nucl. Instrum. Methods Phys. Res. B, 21, 296–299.

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