Additional Metadata
Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Weis, T, Klein, H, Schempp, A, van Amersfoort, P. W, Siebenlist, F, & Thomae, R. W. (1987). A high current multichannel (MEQALAC) system for ion implantation. Nucl. Instrum. Methods Phys. Res. B, 24, 787–790.