Additional Metadata
Journal Appl. Phys. Lett.
Citation
Oostra, D. J, van Ingen, R. P, Haring, R. A, de Vries, A. E, & van Veen, G. N. A. (1987). Near threshold sputtering of Si and Si02 in a CI2 environment. Appl. Phys. Lett., 50, 1506–1508.