Additional Metadata
Publisher A. Hilger
Editor W. T. Williams
Citation
Kuypers, A. D, & Hopman, H. J. (1987). A magnetron reactor for high flux reactive ion etching. In W. T Williams (Ed.), XVIII International Conference on Phenomena in Ionized Gases, Swansea, 13th-17th July 1987 : Contributed Papers (pp. 800–801). A. Hilger.