Ion energy measurement at the powered electrode in an rf discharge

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Journal	J. Appl. Phys.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Kuypers, A. D, & Hopman, H. J. (1988). Ion energy measurement at the powered electrode in an rf discharge. J. Appl. Phys., 63, 1894–1898.

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