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A. D. Kuypers and H. J. Hopman

1988

Ion energy measurement at the powered electrode in an rf discharge

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J. Appl. Phys. , Volume 63 p. 1894- 1898

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Journal J. Appl. Phys.
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Kuypers, A. D, & Hopman, H. J. (1988). Ion energy measurement at the powered electrode in an rf discharge. J. Appl. Phys., 63, 1894–1898.

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