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A. D. Kuypers, E. H. A. Granneman and H. J. Hopman

1988

A magnetic multipole reactor for high-flux reactive-ion etching

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J. Appl. Phys. , Volume 63 p. 1899- 1903

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Journal J. Appl. Phys.
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Kuypers, A. D, Granneman, E. H. A, & Hopman, H. J. (1988). A magnetic multipole reactor for high-flux reactive-ion etching. J. Appl. Phys., 63, 1899–1903.

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