1988-01-01
Summary abstract: structure characterization of silicide-silicon interfaces
Publication
Publication
J. Vac. Sci. Technol. A
,
Volume 6
p. 2094-
2095
Additional Metadata | |
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Journal | J. Vac. Sci. Technol. A |
Citation |
Fischer, A. E. M. J. (1988). Summary abstract: structure characterization of silicide-silicon interfaces. J. Vac. Sci. Technol. A, 6, 2094–2095.
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