1988
Growth of uniform epitaxial CoSi2 films on Si (111)
Publication
Publication
J. Appl. Phys. , Volume 64 p. 3005- 3013
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J. Appl. Phys. | |
Fischer, A. E. M. J, Slijkerman, W. F. J, Nakagawa, K, Smith, R. J, van der Veen, J. F, & Bulle-Lieuwma, C. W. T. (1988). Growth of uniform epitaxial CoSi2 films on Si (111). J. Appl. Phys., 64, 3005–3013.
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