Additional Metadata
Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Westendorp, J. F. M, Kaim, R. E, Odlum, G. B, Schreutelkamp, R, Saris, F.W, & Janssen, K. T. F. (1989). Channeled implantation with a parallel scanned ion beam. Nucl. Instrum. Methods Phys. Res. B, 37/38, 357–360.