Nucl. Instrum. Methods Phys. Res. B

Zhang, B.-X, Wang, Z.L, Schreutelkamp, R, Saris, F.W, Du, A.-Y, & Li, Q. (1990). Damage distribution and annealing behaviour of high energy 115In+ implanted into Si(100). Nucl. Instrum. Methods Phys. Res., Sect B, 48, 425–430.