Additional Metadata
Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Zhang, B. -X, Wang, Z. L, Schreutelkamp, R, Saris, F.W, Du, A. -Y, & Li, Q. (1990). Damage distribution and annealing behaviour of high energy 115In+ implanted into Si(100). Nucl. Instrum. Methods Phys. Res. B, 48, 425–430.