Additional Metadata
Publisher Materials Research Society
Editor Th.M. Besmann , B.M. Gallois
Citation
van Maaren, A.J.P, & Sinke, W.C. (1990). Laser induced photochemical vapor deposition of tungsten on silicon. In Th.M Besmann & B.M Gallois (Eds.), Chemical Vapor Deposition of Refractory Metals and Ceramics : Symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. (pp. 293–298). Materials Research Society.