Publication Office, Japanese Journal of Applied Physics
S. Namba , T. Kitayama

Kuypers, A. D., Hopman, H. J., & Granneman, E. H. A. (1989). High flux low energy reactive ion etching in a magnetic multipole reactor. In S. Namba & T. Kitayama (Eds.), MicroProcess 89 : Proceedings of the 1989 International Symposium on MicroProcess Conference, July 2-5, 1989, Kobe, Japan (pp. 205–208).