Gettering of Cu at buried damage layers made by Si self implantation
|Materials Research Society|
|J. A. Knapp , P. Borgesen , R. A. Zuhr|
Liefting, J. R, Schreutelkamp, R, Lu, W. X, & Saris, F.W. (1990). Gettering of Cu at buried damage layers made by Si self implantation. In J. A Knapp, P Borgesen, & R. A Zuhr (Eds.), Beam-Solid Interactions : Physical Phenomena : Symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A. (pp. 641–644). Materials Research Society.