Additional Metadata
Publisher Materials Research Society
Editor J.A. Knapp , P. Borgesen , R.A. Zuhr
Citation
Custer, J.S, Thompson, M.O, Jacobson, D.C, Poate, J.M, Roorda, S, Sinke, W.C, & Spaepen, F. (1990). Density measurements of ion implanted amorphous silicon. In J.A Knapp, P Borgesen, & R.A Zuhr (Eds.), Beam-Solid Interactions : Physical Phenomena : Symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A. (pp. 689–690). Materials Research Society.