Additional Metadata
Journal Mater. Sci. Eng. B
Citation
Schreutelkamp, R, de Reus, R, Saris, F.W, Kaim, R. E, Westendorp, J. F. M, Janssen, K. T. F, & Ottenheim, J. J. M. (1990). Structural and electrical characterization of Si(100) implanted with P+ and Si+ ions along the [100] channelling direction. Mater. Sci. Eng. B, 7, 149–165.