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R. de Reus, R.J.I.M. Koper, H. Zeijlemaker (Hans) and F.W. Saris

1990

Stability of amorphous Ir-Ta diffusion barriers between Cu and Si

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Mater. Lett. , Volume 9 p. 500- 503

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de Reus, R, Koper, R.J.I.M, Zeijlemaker, H, & Saris, F.W. (1990). Stability of amorphous Ir-Ta diffusion barriers between Cu and Si. Mater. Lett., 9, 500–503.
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