Additional Metadata
Publisher Materials Research Society
Editor A. Katz , S.P. Murarka , A. Appelbaum
Citation
Krans, R.L, Berntsen, A, & Sinke, W.C. (1990). Low temperature tungsten deposition by ArF-laser induced photo-CVD. In A Katz, S.P Murarka, & A Appelbaum (Eds.), Advanced Metallizations in Microelectronics : Symposium held April 16-20, 1990, San Francisco, California, U.S.A. (pp. 597–601). Materials Research Society.