Materials Research Society
A. Katz , S.P. Murarka , A. Appelbaum

Krans, R. L., Berntsen, A., & Sinke, W. (1990). Low temperature tungsten deposition by ArF-laser induced photo-CVD. In A. Katz, S. P. Murarka, & A. Appelbaum (Eds.), Advanced Metallizations in Microelectronics : Symposium held April 16-20, 1990, San Francisco, California, U.S.A. (pp. 597–601).