Additional Metadata
Journal Appl. Phys. Lett.
Citation
Raineri, V, Schreutelkamp, R, Saris, F.W, Janssen, K. T. F, & Kaim, R. E. (1991). Reduction of boron diffusion in silicon by 1 MeV 29Si+ irradiation. Appl. Phys. Lett., 58, 922–924.