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Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Schreutelkamp, R, Raineri, V, Saris, F.W, Kaim, R. E, Westendorp, J. F. M, van der Meulen, P. F. H. M, & Janssen, K. T. F. (1991). Channeling implantation of B and P in silicon. Nucl. Instrum. Methods Phys. Res. B, 55, 615–619.