Nucl. Instrum. Methods Phys. Res. B

Schreutelkamp, R, Raineri, V, Saris, F.W, Kaim, R.E, Westendorp, J.F.M, van der Meulen, P.F.H.M, & Janssen, K.T.F. (1991). Channeling implantation of B and P in silicon. Nucl. Instrum. Methods Phys. Res., Sect B, 55, 615–619.