Additional Metadata
Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Poate, J.M, Coffa, S, Jacobson, D.C, Polman, A, Roth, J.A, Olson, G.L, … Donovan, E. (1991). Amorphous Si - the role of MeV implantation in elucidating defect and thermodynamic properties. Nucl. Instrum. Methods Phys. Res. B, 55, 533–543.