Additional Metadata
Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Schreutelkamp, R, Lu, W. X, Liefting, J. R, Raineri, V, Custer, J. S, & Saris, F.W. (1991). Reduction of secondary defect formation in MeV As ion implanted Si(100). Nucl. Instrum. Methods Phys. Res. B, 59/60, 614–618.