Nucl. Instrum. Methods Phys. Res. B

Schreutelkamp, R., Lu, W. X., Liefting, J. R., Raineri, V., Custer, J. S., & Saris, F. W. (1991). Reduction of secondary defect formation in MeV As ion implanted Si(100). Nucl. Instrum. Methods Phys. Res., Sect B, 59/60, 614–618.