Anomalous Sb redistribution during the preparation of delta-doping layers in silicon

1991-01-01

J. Appl. Phys. , Volume 70 p. 2111- 2116

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Journal	J. Appl. Phys.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Slijkerman, W. F. J, Zagwijn, P. M, van der Veen, J. F, van de Walle, G. F. A, & Gravesteijn, D. J. (1991). Anomalous Sb redistribution during the preparation of delta-doping layers in silicon. J. Appl. Phys., 70, 2111–2116.

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