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Journal J. Appl. Phys.
Citation
Slijkerman, W. F. J, Zagwijn, P. M, van der Veen, J. F, van de Walle, G. F. A, & Gravesteijn, D. J. (1991). Anomalous Sb redistribution during the preparation of delta-doping layers in silicon. J. Appl. Phys., 70, 2111–2116.