Additional Metadata
Journal J. Vac. Sci. Technol. A
Citation
Puik, E. J, van Dorssen, G. E, van der Wiel, M. J, Verhoeven, J, van der Laan, G, & Padmore, H. A. (1991). Characterization of the resolving power of a double multilayer monochromator in the energy range of 600-900eV. J. Vac. Sci. Technol. A, 9, 3142–3148.