1991
Pre-amorphization damage in ion-implanted silicon
Publication
Publication
Mater. Sci. Rep. , Volume 6 p. 275- 366
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Mater. Sci. Rep. | |
Schreutelkamp, R, Custer, J. S, Liefting, J. R, Lu, W. X, & Saris, F.W. (1991). Pre-amorphization damage in ion-implanted silicon. Mater. Sci. Rep., 6, 275–366.
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