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R.L. Krans, C. Brands and W.C. Sinke (Wim)

1992

Kinetics of excimer-laser induced CVD of W

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Appl. Surf. Sci. , Volume 54 p. 117- 120

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Journal Appl. Surf. Sci.
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Krans, R.L, Brands, C, & Sinke, W.C. (1992). Kinetics of excimer-laser induced CVD of W. Appl. Surf. Sci., 54, 117–120.

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